Инерциальные датчики МЭМС

Откройте для себя технологии инерциальных датчиков МЭМС, которые позволяют обнаруживать и измерять ускорение, отклонение, ударные нагрузки, вибрации и скорость вращения, а также осуществлять измерения с несколькими степенями свободы. Определите, какой из типов датчиков МЭМС наиболее подходит для измерения параметров движения в вашей задаче. Загрузите ответы на часто задаваемые вопросы по инерциальным датчикам, обзорные статьи и свежую техническую статью Gyro Mechanical Performance: The Most Important Parameter, MS-2158. Прочитайте истории из успешной практики применения инерциальных датчиков. Ознакомьтесь с бюллетенями технических решений, в которых описываются ключевые особенности технологий инерциальных датчиков МЭМС.
 

iSensor MEMS Accelerometer Subsytems

Part# Device Primary Function Output Type Sensing Axis Range -3dB Bandwidth Voltage Supply (V) Sensitivity Sensitivity Accuracy (%) Temp Sensor
ADIS16229 Accelerometer for ADIS160 - - - 840 Hz 3 to 3.6 - 0.3 -
ADIS16000 Wireless gateway for ADIS - - - - - - - -
ADIS16228 Accelerometer W/FFT proce SPI X, Y, Z - 5 kHz 3.15 to 3.6 - 6 Yes
ADIS16210 Inclinometer SPI X, Y, Z +/- 1.7g 0.05 kHz 3.15 to 3.6 - 0.21 Yes
ADIS16227 Accelerometer W/FFT proce SPI X, Y, Z +/- 70g 9 kHz - - 5 -
ADIS16223 Accelerometer SPI X, Y or Z +/- 70g 14.25 kHz 3.15 to 3.6 4.768 mg/LSB 5 -
ADIS16240 Impact/Recorder SPI X, Y, Z +/- 18g 1.6 kHz 2.4 to 3.6 51.4 mg/LSB - -
ADIS16209 Inclinometer SPI X, Y +/- 90° or +/- 180° 0.05 kHz 3 to 3.6 0.025 °/LSB 0.4 Yes
ADIS16203 Inclinometer SPI Z +/- 180° 2.25 kHz 3 to 3.6 0.025 °/LSB - Yes
ADIS16201 Inclinometer SPI X, Y +/- 1.7g 2.25 kHz 3 to 3.6 0.10 °/LSB 1 Yes
ADIS16006 Accelerometer SPI X, Y +/- 5g 2.25 kHz 3 to 5.25 3.91 mg/LSB 6 Yes
ADIS16003 Accelerometer SPI X, Y +/- 1.7g 2.25 kHz 3 to 5.25 1.22 mg/LSB 7 Yes
 

iSensor MEMS Gyroscope Subsystems

Part# Output Type Range -3dB Bandwidth Sensitivity Noise Density (°/s/rtHz) Voltage Supply (V) Supply Current
ADIS16137 Digital +/- 1000 °/s 400 Hz - 0.00357 4.75 to 5.25 120 mA
ADIS16266 SPI - 0.36 kHz 4.1 LSB/°/s - 4.75 to 5.25 41 mA
ADIS16136 SPI - 0.38 kHz - - 4.75 to 5.25 120 mA
ADIS16133 SPI +/- 1400 0.335 kHz 0.05 °/s/LSB 0.0122 4.85 to 5.15 88 mA
ADIS16135 SPI +/ - 300 °/s - 0.0122 °/s/LSB 0.0122 4.75 to 5.25 88 mA
ADIS16265 SPI +/- 80 to +/- 320 °/s - 0.0183 °/s/LSB 0.044 4.75 to 5.25 41 mA
ADIS16260 SPI +/- 80 to +/- 320 °/s 0.335 kHz 0.0183 °/s/LSB 0.044 4.75 to 5.25 41 mA
ADIS16060 SPI +/- 80 °/s 1 kHz 0.0122 °/s/LSB 0.04 4.75 to 5.25 6.5 mA
ADIS16080 SPI +/- 80 °/s 0.04 kHz 0.098 °/s/LSB 0.05 4.75 to 5.25 7 mA
 

iSensor MEMS Inertial Measurement Units

Part# Gyro Range Bias Tempco In-Run Bias ARW -3dB Bandwidth Noise Density (°/s/rtHz) Linear-g Accelerometer Range Bias Tempco Noise Density (µg/rtHz) Calibration Range (min) Calibration Range (max) MEMS Sensor Type Vsupply Positive (min) Vsupply Positive (max) Isupply (max) Operating Temp Range MEMS Sensitivity (typ)
ADIS16488A +/- 450 °/s 0.0025 5.1 0.3 5.5 kHz 0.0066 0.009 +/-18 g 16 67 70 -40 IMU 3 3.6 254 -40 to +85 0.0031°/s/LSB(+/-75°/s)
ADIS16445 +/- 250 °/s 40 12 0.56 - - 0.015 +/-5 g 0.005 - - - IMU 3.15 3.45 - - -
ADIS16448 +/- 1000 °/s 0.005 14.5 0.66 0.33 kHz - 0.015 +/-18 g 40 - - - IMU 3.15 3.45 76 mA -40 to +85 -
ADIS16485 +/- 450 °/s 0.0025 6.25 0.3 0.33 kHz - 0.009 +/-5 g 0.035 - -40 70 IMU - 3.6 197 mA -40 to +85 -
ADIS16480 +/- 450 °/s 0.0025 6.25 0.3 0.33 kHz - 0.009 +/-18 g 0.035 - -40 85 IMU 3 3.6 254 mA - -
ADIS16407 +/ - 300 °/s 0.01 25 1.9 0.33 kHz - 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 70 mA -40 to +105 0.05 °/s/LSB (+/-300°/s)
ADIS16334 +/ - 300 °/s 0.01 25 - 0.33 kHz 0.044 0.05 +/-5 g 0.05 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16375 +/ - 300 °/s 0.005 12 1 0.33 kHz 0.02 0.013 +/-18 g 0.035 - -40 85 IMU 3 3.6 173 mA -40 to +85 0.01311 °/s/LSB
ADIS16305 +/ - 300 °/s 0.006 25 1.9 0.33 kHz 0.04 0.05 +/-3 g 0.3 - -40 85 IMU 4.75 5.25 42 mA -40 to +85 0.0125°/s/LSB (+/-75°/s)
ADIS16367 +/ - 300 °/s 0.01 47 2 0.33 kHz 0.044 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.05 °/s/LSB (+/-300°/s)
ADIS16362 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.044 0.05 +/-1.7 g 0.05 - -20 70 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16405 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 45 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16365 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-18 g 0.3 - -40 85 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16364 +/ - 300 °/s 0.01 25 2 0.33 kHz 0.05 0.05 +/-5 g 0.05 - -20 70 IMU 4.75 5.25 49 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
ADIS16300 +/ - 300 °/s 0.1 25 1.9 0.33 kHz 0.038 0.05 +/-3 g 0.45 - - 25 IMU 4.75 5.25 42 mA -40 to +105 0.0125°/s/LSB (+/-75°/s)
 

MEMS Accelerometer

Part# Number of Axes Accelerometer Range in g +/- (max) -3dB Bandwidth (typ) Noise Density Output Type Sensitivity (typ) Sensitivity Accuracy Supply Current Voltage Supply Automotive Recommended Operating Temp Range
ADXL363 3 - - - Digital 1 to 4 mg/LSB - 1.95 µA - - -40 to +85
ADXL375 3 +/- 200g 1.6 kHz 5000 Digital 20.5 LSBs/g - 145 µA - - -40 to +85
ADXL313 3 +/- 0.5 g 1.6 kHz 150 Digital 1024 LSB/g 10 170 µA 2.0 to 3.6 Yes -40 to +105
ADXL377 3 +/- 200g 1.6 kHz 2400 Analog 6.5 mV/g - 300 µA 3 to 3.6 - -40 to +85
ADXL362 3 +/- 2/4/8g 0.2 kHz 175 Digital 1 to 4 mg/LSB - 1.8 µA 1.6 to 3.5 - -40 to +85
ADXL350 3 +/- 2/4/8g 1.6 kHz - SPI up to 256 LSB/g - 166 µA 2.0 to 3.6 - -40 to +85
ADXL344 3 +/- 2/4/8/16g 1.6 kHz - SPI 256 LSB/g - 140 µA 1.7 to 2.75 - -40 to +85
ADXL343 3 +/- 2/4/8/16g 0.32 kHz - Digital 256 LSB/g - - 2.0 to 3.6 - -
ADXL212 2 +/- 2g 0.5 kHz - Digital 12.5 %/g 12.5 0.7 mA 3 to 5.25 - -40 to +85
ADXL206 2 +/- 5g - 110 Analog 312 mV/g - 0.7 mA 4.75 to 5.25 - -40 to 175°C
ADXL312 3 +/- 12 g 1.6 kHz 340 Digital 345 LSB/g - 170 µA 2.0 to 3.6 Yes -40 to +105
ADXL337 3 +/- 3g 1.6 kHz 175 Analog 300 mV/g - 300 µA 1.8 to 3.6 - -40 to +85
ADXL346 3 +/- 2/4/8/16g 1.6 kHz - Digital up to 256 LSB/g 10 145 µA 1.7 to 2.75 - -40 to +85
ADXL327 3 +/- 2g 1.6 kHz 250 Analog 420 mV/g 10 350 µA 1.8 to 3.6 - -40 to +85
ADXL326 3 +/- 16g 1.6 kHz 250 Analog 57 mV/g 10 350 µA 1.8 to 3.6 - -40 to +85
ADXL325 3 +/- 5g 1.6 kHz 250 Analog 174 mV/g 10 350 µA 1.8 to 3.6 - -40 to +85
ADXL345 3 +/- 2/4/8/16g 1.6 kHz - Digital up to 256 LSB/g 10 145 µA 2.0 to 3.6 - -40 to +85
ADXL001 1 +/- 70g 22 kHz 4000 Analog 16 mV/g (+/- 70g) - 5 mA 3.135 to 6 - -40 to +125
ADXL335 3 +/- 3g 1.6 kHz 300 Analog 300 mV/g 10 350 µA 1.8 to 3.6 - -40 to +85
ADXL180 1 50 g to 500 g 0.8 kHz - Digital 0.125 g/LSB (50 g) - 7.7 mA 5 to 14.5 - -40 to +125
ADXL213 2 +/- 1.2g 2.5 kHz 160 PWM 30 %/g 10 0.7 mA 3 to 6 - -40 to +85
ADXL203 2 +/- 1.7g 2.5 kHz 110 Analog 1000 mV/g 4 0.7 mA 3 to 6 - -40 to +125
ADXL103 1 +/- 1.7g 2.5 kHz 110 Analog 1000 mV/g 4 0.7 mA 3 to 6 Yes -40 to +125
ADXL78 1 +/- 70g 0.4 kHz 1800 Analog 27mV/g 5 1.3 mA 4.75 to 5.25 Yes -40 to +105
ADXL278 2 +/- 70g 0.4 kHz 1800 Analog 27mV/g 5 2.2 mA 4.75 to 5.25 Yes -40 to +105
ADXL193 1 +/- 250g 0.4 kHz 5000 Analog 8 mV/g 5 1.5 mA 4.75 to 5.25 Yes -40 to +125
 

MEMS Gyroscopes

Part# Sensing Axis Measurement Range MEMS Sensitivity (typ) Noise Density (typ) -3dB Bandwidth (typ) Nonlinearity (typ) Temp Sensor Voltage Reference Voltage Supply Supply Current (typ) Operating Temp Range Automotive Recommended MEMS Sensor Type
ADXRS645 - +/- 20000 °/s - 0.25 2000 Hz 0.1% of FS Yes No 4.75 to 5.25 - -40 to 175°C - Gyroscope
ADXRS646 Z +/- 250 °/s 9 mV/°/s 0.01 1 0.01% of FS Yes - 5.75 to 6.25 4 mA -40 to +125 - Gyroscope
ADXRS800 Z +/-300 °/s - - - - Yes - 3 to 5 - -40 to +105 Yes Gyroscope
ADXRS642 Z +/- 250 °/s 7 mV/°/s 0.02 2 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA -40 to +105 - Gyroscope
ADXRS649 - +/- 20000 °/s 0.1 mV/°/s 0.25 2 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA -40 to +105 - Gyroscope
ADXRS453 - +/ - 300 °/s 80 LSB/°/s 0.015 0.775 kHz 0.05% of FS rms Yes No 3 to 5.25 6 mA -40 to +105 - Gyroscope
ADXRS450 - +/-300 °/s 80 LSB/°/s 0.015 0.08 kHz 0.04% of FS Yes No 3 to 5.25 6 mA -40 to +105 - Gyroscope
ADXRS652 - +/- 250 °/s 7 mV/°/s 0.06 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA -40 to +105 - Gyroscope
ADXRS624 - +/- 50 °/s 25 mV/°/s 0.04 1 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA -40 to +105 - Gyroscope
ADXRS623 - +/- 150 °/s 12.5mV/°/s 0.04 3 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA -40 to +105 - Gyroscope
ADXRS622 Z +/- 250 °/s 7 mV/°/s 0.06 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA -40 to +105 - Gyroscope
ADXRS620 - +/-300 °/s 6 mv/°/s 0.05 2.5 kHz 0.1% of FS Yes No 4.75 to 5.25 3.5 mA -40 to +105 - Gyroscope
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